Technical Data | September 2019

3M FC3283 electronic fluoride solution CAS 86508-42-1

Product description
3M™ Fluorinert™ Electronic Liquid FC-3283 is a clear, colorless, thermally stable, fully-fluorinated liquid ideal for use in
many single-phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-65°C to
128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Other uses include
heat transfer for data centers, high performance computing, power electronics and aviation electronics. Fluorinert FC-
3283 liquid is also used for electronics testing and as an inert reaction media. Because Fluorinert liquid FC-3283 is
primarily a single compound, its composition will not shift or fractionate with time. This keeps fluid loss to a minimum
enabling transport properties to remain unchanged.

Typical electrical properties
Note: The following technical information and data should be considered representative or typical only and should not be used for
specification purposes. Final product specifications and testing methods will be outlined in the products Certificate of Analysis

Heat transfer properties
The following formulas can be used to calculate the specific heat, thermal conductivity, density and vapor
pressure of 3M™ Fluorinert™ Electronic Liquid FC-3283 at various temperatures.
Specific Heat (J kg-1 °C-1) = 1014 + 1.554 (T, °C)
Thermal Conductivity (W m-1 °C-1) = 0.065 – 0.000056 (T, °C)
Density (kg/m3) = 1878 – 2.455 (T, °C)
Log10 (Vapor Pressure (pascals)) = 10.237 – (2110/(T, K))\

The following graph can be used to determine the viscosity of Fluorinert liquid FC-3283 over the indicated
temperature range

Materials compatibility
Fluorinert liquid FC-3283 is compatible with most metals, plastics and elastomers. Contact 3M for more information.

Storage and shelf life
The shelf life of 3M™ Fluorinert™ Electronic Liquid FC-3283 is 36 months from the date of manufacture when stored in
the original packaging materials and stored at 21°C (70°F) and 50% relative humidity.

Toxicity profile

Not for specification purposes.
3M Fluorinert liquid FC-3283 is virtually non-irritating to the eyes and skin. The product also demonstrates very low
toxicity. A Safety Data Sheet (SDS) is available from www.3m.com/SDS.

Safety and handling

Before using this product, please thoroughly read the current product SDS and label, following all applicable safety
precautions described therein (e.g., recommended storage and safe handling, appropriate exposure controls and
personal protective equipment (PPE), addressing accidental spills, disposal considerations, etc.). Fluorinert liquid FC-
3283 is nonflammable and is resistant to thermal breakdown and hydrolysis during typical use and storage.

Environmental properties

Fluorinert liquid FC-3283 has zero ozone depletion potential. Additionally, this product has negligible photochemical
reactivity and therefore it does not appreciably contribute to ground-level smog formation. As such, it is not defined or
regulated by the U.S. EPA as a volatile organic compound (VOC).
As a perfluorocarbon (PFC), this product has a high global warming potential and a long atmospheric lifetime. As such,
its use should be carefully managed to minimize emissions.
3M recommends that users of Fluorinert liquid FC-3283 further limit emissions by employing good conservation
practices, and by implementing recovery, recycling and/or proper disposal procedures. In general, 3M recommends
that Fluorinert-branded liquids be disposed of by incineration at a permitted industrial waste facility capable of handling
halogenated materials, in accordance with all applicable local, regional, national, and/or international regulations. See
product SDS for further details. 3M also offers a Used Fluid Disposal Program.

Recycle and disposal options
Used Fluid Disposal Program

As part of 3M’s commitment to product stewardship and customer service, we offer the 3M Used Fluid Disposal
Program for free pickup of used 3M fluids in the U.S. This program is provided through Clean Harbors Environmental
Services. Working with Clean Harbors will ensure that your used 3M fluids will be managed properly and responsibly.
A minimum of 30 gallons of used 3M fluid is required for participation in this free program. Amounts of less than